Controlled arsenic diffusion in epitaxial CdXHg1-XTe layers in the evaporation-condensation-diffusion process
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Дата
2002
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Анотація
The results of controlled doping of CdxHg1yxTe epitaxial layers are presented. The investigated layers were obtained by the
evaporation–condensation–diffusion method in the process of isothermal growth. The process of auto diffusion from the solid
phase was investigated. This process consists in the diffusion of As dopants from CdTe substrate into the grown epitaxial layer.
Two types of CdTe substrates, uniformly doped in the process of synthesis and unalloyed with ion implanted surface layer, have
been used as sources of As diffusant. Comparative analysis of galvanomagnetic measurements and SIMS spectra was carried out.
The results of investigations indicate the very high, almost 100%, electrical activity of As dopants in the CdxHg1yxTe epitaxial
grown layer. 2002 Elsevier Science B.V. All rights reserved.
Опис
Ключові слова
doping, diffusion, CdHgTe
Бібліографічний опис
Controlled arsenic diffusion in epitaxial CdXHg1-XTe layers in the evaporation-condensation-diffusion process / A. Vlasov, V. Pysarevsky, O. Storchun, A. Shevchenko, A. Bonchyk, H. Pokhmurska, A. Barcz, Z. Swiatek // Thin Solid Films. – 2002. – Vol. 403/404. – P. 144–147. (Scopus)